A New Ionization Gauge with a Bessel-Box Type Energy Filter for the Measurement of an Extreme High Vacuum. Axial-Symmetric Transmission Gauge(AT gauge).

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Other Title
  • Ｂｅｓｓｅｌ‐Ｂｏｘ形エネルギーフィルターを用いた極高真空用電離真空計　　Ａｘｉａｌ‐Ｓｙｍｍｅｔｒｉｃ　Ｔｒａｎｓｍｉｓｓｉｏｎ　Ｇａｕｇｅ（ＡＴゲージ）
  • Bessel-Boxガタ エネルギー フィルター オ モチイタ キョク コウ
  • Axial-Symmetric Transmission Gauge (AT gauge)
  • Axial-Symmetric Transmission Gauge (ATゲージ)

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Abstract

The characteristics of a new ionization gauge for pressure measurement in XHV were examined by experiments and computer simulations. The new gauge (axial-symmetric transmission gauge : AT gauge) has a Bessel-Box type energy filter between a B-A gauge type ionizer and a secondary electron multiplier as an ion collector to eliminate the limiting factors of pressure measurement in XHV, such as the X-ray effect and electron stimulated desorption (ESD) ions. The lower limit of the pressure measurement at present is estimated to be about 10-12 Pa. The sensitivity factor of the AT gauge, which was further corrected for the effect of outgassing by the conductance modulation method (CMM), is almost constant in the pressure range from 10-10 to 10-6 Pa and is (2.3±0.1) ×10-3 Pa-1 for hydrogen.

Journal

  • Shinku

    Shinku 40 (10), 780-791, 1997

    The Vacuum Society of Japan

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