AES analysis of insulating oxide materials by means of simultaneous helium ion bombardment.

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Other Title
  • 酸化物試料のオージェ分析におけるＨｅ｀＋´イオン照射効果
  • サンカブツ シリョウ ノ オージェ ブンセキ ニ オケル He + イオン シ

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Description

In Auger electron spectroscopy (AES) on insulating materials, Auger peaks are tend to be disturbed by background noise due to negative charging of the material surface. To suppress this noise, we discribed a method to reduce the surface negative charges by means of simultaneous helium ion bombardment and discussed the mechanism of the surface charge reduction which improve the AES spectrum and AES peak shifts. By neutralizing the negative charges with the optimum amount of helium ion bombardment, maximum AES signal intensity and normal Auger electron energy can be obtained. Excess negative or positive charges disturb the escaping Auger electrons and Auger eneregy due to coulomb force. We estimated the neutralizing effects by examining Auger peak intensity and peak energy at common oxygen Auger peakes of Al2O3, SiO2 and SrTiO3 with various He+ ion beam currents.

Journal

  • Shinku

    Shinku 33 (12), 928-933, 1990

    The Vacuum Society of Japan

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