レーザを用いた圧力計測　２　レーザ生成イオンの新しい検出システム

DOI Web Site

書誌事項

タイトル別名
  • Pressure measurement with laser. 2. A new ion counting system for laser generated ions.
  • レーザ オ モチイタ アツリョク ケイソク 2 レーザ セイセイ イオン ノ
  • 2. A New Ion Counting System for Laser Generated Ions
  • 2.レーザ生成イオンの新しい検出システム

この論文をさがす

抄録

A new ion counting system useful in pressure measurement with laser was constructed. The system is composed of a microchannel-plate intensifier, a CCD camera, a frame buffer, a particle counter, and a personal computer. By applying it to detection of acetone ions ionized by an excimer laser pulse, it was confirmed that the system has i) a high peak counting rate (exceeding 1010 cps), ii) linear response to the number of incident ions, and iii) higher accuracy than conventional analog detection system. The detection limit in the pressure measurement by laser with the present system is also discussed, and the measurement in the pressure range between 10-10 Pa and 100 Pa is projected.

収録刊行物

  • 真空

    真空 33 (1), 15-20, 1990

    一般社団法人 日本真空学会

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ