Conic Peak/Dimple Roughness Model for Explaining the Reduction of Gas Flow Rate in Channels

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  • SAWADA Tadashi
    Department of Mechanical Engineering, Faculty of Engineering and Resource Science, Akita University
  • SUGIYAMA Wataru
    Department of Mechanical Engineering, Faculty of Engineering and Resource Science, Akita University
  • YABUKI Masuhisa
    Department of Mechanical Engineering, Faculty of Engineering and Resource Science, Akita University

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Other Title
  • 微小ギャップの排気　　チャンネル内ガス流の流量減少を説明するための円錐凹凸粗さモデル
  • チャンネル ナイ ガスリュウ ノ リュウリョウ ゲンショウ オ セツメイ スル タメ ノ エンスイ オウトツ アラサ モデル

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Journal

  • Shinku

    Shinku 43 (10), 956-961, 2000

    The Vacuum Society of Japan

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