Electro-Conducting SnO<SUB>2</SUB> and In<SUB>2</SUB>O<SUB>3</SUB> Films

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  • 電導性ＳｎＯ?S２?T膜，Ｉｎ?S２?TＯ?S３?T膜
  • デンドウセイ SnO2 マク In2O3 マク

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Abstract

The present state of the art of transparent, electrically conducting stannic oxide and indium oxide films is reviewed from the points of production technique, optical and electrical properties, and their applications in industry. Emphasis is on the relationship between the production method and the properties of films. In particular, the difference in the optimised doping level for each production method is explicitly described.<BR>Some new evidences are presented to discuss the so-called “alkali effect” observed for the SnO2/glass case, which leads to a conclusion that the effect does not always prevail. Some useful knowledge on several kinds of glasses is also presented.

Journal

  • Shinku

    Shinku 22 (7), 253-266, 1979

    The Vacuum Society of Japan

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