Quartz Crystal Microbalance Applicable to the Chemical Reactions of Thin Metal Films

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Other Title
  • 水晶結晶マイクロバランスによる金属薄膜の化学反応の研究
  • スイショウ ケッショウ マイクロバランス ニ ヨル キンゾク ハクマク ノ カガク ハンノウ ノ ケンキュウ

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Description

A quartz crystal microbalance whose stability is better than 2×10-7/day has been constructed for measurements of weight changes due to chemical reactions. The sensitivities for mass determination of 5 MHz and 3.58 MHz quartz crystals used are respectively 5. 64 × 107 Hz/ (g/cm2) and 2. 89×107 Hz / (g/cm2). Its oscillator circuits, some new attachments and techniques for the present apparatus are detailed. Some examples of the weight gain data are presented for the reactions of gases with vacuum-deposited metal films.

Journal

  • Shinku

    Shinku 13 (9), 296-302, 1970

    The Vacuum Society of Japan

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