サマリー・アブストラクト
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- KUROKOUCHI Satoshi
- Japan Vacs Metal Co., Ltd.
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- OKABE Masayuki
- Japan Vacs Metal Co., Ltd.
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- SAITO Mitsuyoshi
- Japan Vacs Metal Co., Ltd.
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- MORITA Shinsaku
- Japan Vacs Metal Co., Ltd.
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- SHIOKAWA Yoshiro
- Joint Research Center for Atom Technology
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- ICHIKAWA Masakazu
- Joint Research Center for Atom Technology
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- KANNO Seiichiro
- Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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- USUI Tatehito
- Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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- SUDOH Koichi
- The Institute of Scientific and Industrial Research, Osaka University
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- YOSHINOBU Tatsuo
- The Institute of Scientific and Industrial Research, Osaka University
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- IWASAKI Hiroshi
- The Institute of Scientific and Industrial Research, Osaka University
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- TANAKA Hiroaki
- Department of Electrical Engineering, Nagasaki Institute of Applied Science
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- OKUNO Kimio
- Department of Electrical Engineering, Nagasaki Institute of Applied Science
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- MIURA Tadao
- Tanaka Solid Junction Project, ERATO/JST
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- SUMIYA Touru
- Tanaka Solid Junction Project, ERATO/JST
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- HONDA Katsuya
- Tanaka Solid Junction Project, ERATO/JST
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- TANAKA Shun-ichiro
- Tanaka Solid Junction Project, ERATO/JST
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- INOKUTI Yukio
- Research Raboratories, Kawasaki Steel Corp.
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- SUZUKI Kazuhiro
- Research Raboratories, Kawasaki Steel Corp.
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- TAKAHASHI Nastuki
- Industrial Equipment Division, ULVAC JAPAN, Ltd.
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- OHKUBO Osamu
- Industrial Equipment Division, ULVAC JAPAN, Ltd.
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- SAWAHIRA Yoshihiro
- AMS R & DC, Kanazawa Institute of Technology
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- SATO Akishige
- AMS R & DC, Kanazawa Institute of Technology
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- KIKUCHI Naoto
- AMS R & DC, Kanazawa Institute of Technology
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- KUSANO Eiji
- AMS R & DC, Kanazawa Institute of Technology
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- NANTO Hidehito
- AMS R & DC, Kanazawa Institute of Technology
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- KINBARA Akira
- AMS R & DC, Kanazawa Institute of Technology
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- NARUSHIMA Tetsuya
- National Research Institute for Metals University of Tsukuba, Institute of Physics
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- ITAKURA Akiko
- National Research Institute for Metals
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- KAWABE Takaya
- University of Tsukuba, Institute of Physics
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- KITAJIMA Masahiro
- National Research Institute for Metals
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- KITAGAWA Masaru
- AMS R & DC, Kanazawa Institute of Technology
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- OHYA Toshiyuki
- TOYOBO Research Institute
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- NAGAHAMA Hiroyuki
- TOYOBO Research Institute
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- YOKOYAMA Sei-ichiroh
- TOYOBO Research Institute
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- ARAKAWA Ichiro
- Department of Physics, Gakushuin University Institute for Molecular Science
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- ADACHI Takashi
- Department of Physics, Gakushuin University
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- HIRAYAMA Takato
- Department of Physics, Gakushuin University
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- MITSUKE Koichiro
- Institute for Molecular Science
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- SAKURAI Makoto
- Institute for Molecular Science
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- IGARASHI Sin-ichi
- Department of Physics, Gakushuin University
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- ABE Yukiko
- Department of Physics, Gakushuin University
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- IRIE Yasuo
- Department of Physics, Gakushuin University
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- KAMBE Miyuki
- Department of Physics, Gakushuin University
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- TOSAKA Aki
- Department of Physics, Gakushuin University
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- HAMAMATSU Satoko
- Department of Physics, Gakushuin University
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- ISHII Satoshi
- Department of Physics, Gakushuin University
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- NORIMITSU Yoshiyuki
- Department of Electrical Engineering, Faculty of Engineering, Science University of Tokyo
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- SUTOU Toshimi
- Department of Electrical Engineering, Faculty of Engineering, Science University of Tokyo
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- UBUKATA Noriyuki
- Department of Electrical Engineering, Faculty of Engineering, Science University of Tokyo
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- OINUMA Yoshihiro
- Department of Electrical Engineering, Faculty of Engineering, Science University of Tokyo
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- SAITO Shigeru
- Department of Electrical Engineering, Faculty of Engineering, Science University of Tokyo
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- KATOH Masaaki
- Gunma College of Technology
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- TAJIMA Kenichi
- Gunma College of Technology
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- HORIMOTO Daisuke
- Gunma College of Technology
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- OHTE Takeo
- Gunma College of Technology
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- KOJIMA Akira
- Gunma College of Technology
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- OHI Seiya
- Gunma College of Technology
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- SHIOYA Takashi
- Gunma College of Technology
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- KOBAYASHI Kazuhiko
- Faculty of Engineering, Tamagawa University
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- NAKAJIMA Hidefumi
- Faculty of Engineering, Tamagawa University
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- YOKOYAMA Satoshi
- Faculty of Engineering, Tamagawa University
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- OBARA Hiroyuki
- Faculty of Engineering, Tamagawa University
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- SAKAI Hajime
- Fukushima College For Women
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- OGOSHI Yasuhiro
- Fukushima College For Women
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- KOIKE Takuro
- Faculty of Engineering, Tamagawa University
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- UCHIMURA Koichiro
- The Institute of Scientific and Industrial Research, Osaka University
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- TABATA Hitoshi
- The Institute of Scientific and Industrial Research, Osaka University
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- KAWAI Tomoji
- The Institute of Scientific and Industrial Research, Osaka University
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- HIBINO Yutaka
- Ion Engineering Research Institute Corporation
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- XU Guochun
- Ion Engineering Research Institute Corporation
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- SUZUKI Yasuo
- Ion Engineering Research Institute Corporation
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- TANIHARA Masao
- Ion Engineering Research Institute Corporation
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- IMANISHI Yukio
- Graduate school of Materials Science Nara Institute of Science and Technology
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- SUGINUMA Shigemi
- Electrotechnical Laboratory
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- HIRATA Masahiro
- Electrotechnical Laboratory
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- AKIMICHI Hitoshi
- ULVAC Corporation
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- TAKEUCHI Kyoko
- ULVAC Corporation
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- TUZI Yutaka
- ULVAC Corporation
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- TOSA Masahiro
- National Research Institute for Metals
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- KASAHARA Akira
- National Research Institute for Metals
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- LEE Kyung Sub
- National Research Institute for Metals
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- YOSHIHARA Kazuhiro
- National Research Institute for Metals
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- TANAKA Tomonari
- ULVAC Corporation
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- SAWADA Tadashi
- Faculty of Engineering and Resource Science, Akita University
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- SUGIYAMA Wataru
- Faculty of Engineering and Resource Science, Akita University
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- OTA Koyu
- Department of Physics, Yokohama National University
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- YAMAUCHI Daisuke
- Department of Physics, Yokohama National University
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- SATO Shinobu
- Department of Physics, Yokohama National University
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- TANAKA Masatoshi
- Department of Physics, Yokohama National University
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- KISHIDA Masaaki
- School of Materials Science, Japan Advanced Institute of Science and Technology
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- TOMITORI Masahiko
- School of Materials Science, Japan Advanced Institute of Science and Technology
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- ASAKURA Kiyotaka
- Research Center for Spectrochemistry and Department of Chemistry, Graduate School of Science, The University of Tokyo
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- CHUN Wang-Jae
- Department of Chemistry, Graduate School of Science, The University of Tokyo
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- IWASAWA Yasuhiro
- Department of Chemistry, Graduate School of Science, The University of Tokyo
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- KAKITANI Kiminori
- Department of Electronic Engineering, Okayama University of Science
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- KAJI Hiroko
- Department of Simulation Physics, Okayama University of Science
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- YAGI Yoichiro
- Department of Simulation Physics, Okayama University of Science
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- YOSHIMORI Akio
- Department of Simulation Physics, Okayama University of Science
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- OKAMOTO Akio
- Technology Research Institute of Osaka Prefecture
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- NOSAKA Toshikazu
- Technology Research Institute of Osaka Prefecture
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- YOSHITAKE Masaaki
- Technology Research Institute of Osaka Prefecture
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- OGAWA Souichi
- Technology Research Institute of Osaka Prefecture
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- NAKAMURA Shigeaki
- Takamatsu National College of Technology
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- SAITO Nobuo
- Takamatsu National College of Technology
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- YOSHIOKA Shoji
- Takamatsu National College of Technology
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- NAKAAKI Isamu
- Shizuoka Prefectural Fuji Industrial Institute
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- HASEGAWA Hideo
- Department of Electrical Engineering, National Defense Academy
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- MIHARA Toshiyuki
- Osaka National Research Institute, AIST
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- MOCHIZUKI Shoichi
- Osaka National Research Institute, AIST
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- TAMURA Shigeharu
- Osaka National Research Institute, AIST
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- KOBAYASHI Hironori
- Osaka National Research Institute, AIST
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- MAKABE Ryoji
- Osaka National Research Institute, AIST
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- ISHIDA Tadashi
- Osaka National Research Institute, AIST
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- SATO Yoshiyuki
- Osaka National Research Institute, AIST
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- ANDO Masanori
- Osaka National Research Institute, AIST
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- KOBAYASHI Tetsuhiko
- Osaka National Research Institute, AIST
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- HIOKI Ayako
- Technology Research Institute of Osaka Prefecture
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- NATSUKAWA Kazuki
- Technology Research Institute of Osaka Prefecture
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- INOUE Koji
- Technology Research Institute of Osaka Prefecture
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- NAKAYAMA Yoshikazu
- Department of Physics and Electronics, Osaka Prefecture University
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- SATO Takayuki
- Department of Electrical and Electronic Systems, Saitama University
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- MICHIZONO Shinichiro
- High Energy Accelerator Research Organization
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- SAITO Yoshio
- High Energy Accelerator Research Organization
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- KOBAYASHI Shinichi
- Department of Electrical and Electronic Systems, Saitama University
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- KOKUBUN Kiyohide
- Electrotechnical Laboratory
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- WATANABE Yuuki
- Department of Electrical and Electronic Systems, Saitama University
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- TOKUTAKA Heizo
- Tottori University
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- FUJIMURA Kikuo
- Tottori University
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- SHIMIZU Tatsuo
- Texas Instruments, Tsukuba Research & Development Center Ltd.
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- NISHIOKA Yasushiro
- Texas Instruments, Tsukuba Research & Development Center Ltd.
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- TANAKA Hideki
- School of Materials Science, Japan Advanced Institute of Science and Technology
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- WAKIMOTO Hiroyuki
- School of Materials Science, Japan Advanced Institute of Science and Technology
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- MIYAZAKI Toshihiko
- School of Materials Science, Japan Advanced Institute of Science and Technology
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- MIZUTANI Goro
- School of Materials Science, Japan Advanced Institute of Science and Technology “Fields and Reactions”, PRESTO, Japan Science and Technology Corporation
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- USHIODA Sukekatsu
- School of Materials Science, Japan Advanced Institute of Science and Technology
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- YAMAGUCHI Yoshitake
- Department of Chemistry, Graduate School of Science, The University of Tokyo
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- TAKAKUSAGI Satoru
- Department of Chemistry, Graduate School of Science, The University of Tokyo
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- KATO Makoto
- JEOL
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- SAKAI Yuji
- JEOL
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- KUROKAWA Akira
- Electrotechnical Laboratory
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- ICHIMURA Shingo
- Electrotechnical Laboratory
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- NAKAMURA Ken
- Electrotechnical Laboratory
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- AOKI Takanori
- Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
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- TODA Syogo
- Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
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- SUZUKI Akio
- Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
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- MATSUSHITA Tatsuhiko
- Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
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- OKUDA Masahiro
- Department of Physics and Electronics, Osaka Prefecture University
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- HAMAJI Kazuaki
- Department of Electrical Engineering and Electronics, College of Engineering, Osaka Sangyo University
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- KAKEHI Yoshiharu
- Technology Research Institute of Osaka Prefecture
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- YOTSUYA Tsutom
- Osaka Science and Technology Center
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- MATSUOKA Norihiro
- Sharp Corporation
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- TSUTSUMI Yoshitsugu
- Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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- TOMIOKA Hideki
- Device Development Center, Hitachi Ltd.
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- OKAMOTO Yoshio
- Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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- MURAI Kensuke
- Osaka National Research Institute, AIST
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- YASUMOTO Masato
- Osaka National Research Institute, AIST
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- UMESAKI Norimasa
- Osaka National Research Institute, AIST
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- NAKANO Hirohiko
- Samco International Inc.
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- TATSUTA Toshiaki
- Samco International Inc.
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- MATSUO Jiro
- Ion-Beam Engineering Experimental Laboratory, Kyoto University
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- YAMADA Isao
- Ion-Beam Engineering Experimental Laboratory, Kyoto University
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- MAGARA Hiroyuki
- Industrial Technology Center of Fukui Prefecture
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- TABATA Osamu
- Thin Film Lab.
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- HATANO Touichi
- National Institute for Research in Inorganic Materials
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- KOTERA Masatoshi
- Department of Electronic Engineering, Osaka Institute of Technology
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- YAMAGUCHI Kiyoshi
- Department of Electronic Engineering, Osaka Institute of Technology
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- HORII Naohiro
- Fukui National College of Technology
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- OKIMURA Kunio
- Department of Electronics, Tokai University
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- SHIBATA Akira
- Fukui National College of Technology
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- MURAKAMI Hiroshi
- Electrotechnical Laboratory
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- KAMEYAMA Ikuya
- Electrotechnical Laboratory
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- SUKENOBU Satoru
- Toshiba Corporation
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- MIMOTO Kazuhiko
- Plasma Physics Laboratory, Graduate School of Engineering, Osaka University
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- MATSUMOTO Takashi
- Plasma Physics Laboratory, Graduate School of Engineering, Osaka University
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- YOSHIKAWA Takafumi
- Plasma Physics Laboratory, Graduate School of Engineering, Osaka University
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- KIUCHI Masato
- Plasma Physics Laboratory, Graduate School of Engineering, Osaka University Osaka National Research Institute, AIST
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- GOTO Seiichi
- Plasma Physics Laboratory, Graduate School of Engineering, Osaka University
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- OHBA Masatoshi
- ULVAC Japan Ltd.
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- AGAWA Yoshiaki
- ULVAC Japan Ltd.
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- SHIBUTANI Kazuma
- Department of Electronic Science and Engineering, Kyoto University
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- TSUJI Hiroshi
- Department of Electronic Science and Engineering, Kyoto University
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- GOTOH Yasuhito
- Department of Electronic Science and Engineering, Kyoto University
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- ISHIKAWA Junzo
- Department of Electronic Science and Engineering, Kyoto University
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- KAWADA Hiroki
- Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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- KITSUNAI Hiroyuki
- Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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- TSUMAKI Nobuo
- Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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- KATSUYAMA Masanori
- Device Development Center, Hitachi Ltd.
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- SUZUKI Shinichi
- Device Development Center, Hitachi Ltd.
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- TANAHASHI Katsuto
- Research Institute for Advanced Science and Technology, Osaka Prefecture University
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- KAWAMURA Yuichi
- Research Institute for Advanced Science and Technology, Osaka Prefecture University
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- INOUE Naohisa
- Research Institute for Advanced Science and Technology, Osaka Prefecture University
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- HOMMA Yoshikazu
- NTT Sience and Core Technology Laboratory
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- KIKUCHI Michimasa
- Research Institute for Advanced Science and Technology, Osaka Prefecture University
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- ISHIKAWA Kazumasa
- Department of Precision Engineering. Chiba Institute of Technology
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- HOMMA Teiichi
- Department of Precision Engineering. Chiba Institute of Technology
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- SUGANUMA Yoshinori
- School of Materials Science, Japan Advanced Institute of Science and Technology
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- LI Nan
- The Institute of Scientific and Industrial Research, Osaka University
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- KOBAYASHI Katsuyoshi
- Department of Physics, Ochanomizu University
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- SAKAKIBARA Nobuyoshi
- Advanced Mobile Telecommunication Technology Inc.
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- UENO Yoshiki
- Advanced Mobile Telecommunication Technology Inc.
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- AOKI Masayuki
- Advanced Mobile Telecommunication Technology Inc.
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- YASUI Toshiaki
- Department of Systems and Human Science, Graduate School of Engineering Science, Osaka University
-
- MORIMOTO Keito
- Department of Systems and Human Science, Graduate School of Engineering Science, Osaka University
-
- TAHARA Hirokazu
- Department of Systems and Human Science, Graduate School of Engineering Science, Osaka University
-
- YOSHIKAWA Takao
- Department of Systems and Human Science, Graduate School of Engineering Science, Osaka University
-
- KODERA Hidekazu
- Department of Systems and Human Science, Graduate School of Engineering Science, Osaka University
-
- UOTA Masahiko
- High Energy Accelerator Research Organization
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- SATOH Yoshihiro
- High Energy Accelerator Research Organization
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- KUBO Tomio
- High Energy Accelerator Research Organization
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- MOCHIJI Kozo
- PREST, Japan Science and Technology Corporation Central Research Laboratory, Hitachi Ltd.
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- ITABASHI Naoshi
- Central Research Laboratory, Hitachi Ltd.
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- SHIMIZU Hiroshi
- Institute of Laser Science, University of Electro-Communications
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- OHTANI Shunsuke
- Institute of Laser Science, University of Electro-Communications
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- OKUNO Kazuhiko
- Faculty of Science, Tokyo Metropolitan University
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- KOBAYASHI Nobuo
- Faculty of Science, Tokyo Metropolitan University
Journal
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- Shinku
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Shinku 42 (3), 417-495, 1999
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390001204068095872
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- NII Article ID
- 130000869369
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- ISSN
- 18809413
- 05598516
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- Text Lang
- ja
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- Data Source
-
- JaLC
- Crossref
- CiNii Articles