Calibration of 253.7nm irradiance based on the silicon photodiode self-calibration technique (2)

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  • シリコンホトダイオードの自己校正法にもとついた253.7nm放射の絶対測定 (2)
  • 測定方法の確度の検討
  • Analysis of the uncertainties

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An attempt was made to intercompare the accuracy for the 3 methods of 253.7nm irradiance calibration. The first method, which we have already reported, is based on the silicon photodiode self-calibration technique. In this method, the absolute responsivity at 253.7nm of the photodiode was determined by the absolute responsivity at 632.8nm calibrated by the self-calibration technique and the relative spectral responsivity measurement. The second method uses a thermal detector calibrated by standard lamps and optical filters. The third method is a comparison measurement with the blackbody using a monochromator. The scales of 253.7nm irradiance realized by the three methods agreed within 1.5% and it is confirmed that each method has sufficient accuracy for primary standards of the 253.7nm irradiance.

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