Three-Dimensional Observation of Superlattice Domains in Ordering Alloys by DFTEM Tomography

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  • KIMURA Kosuke
    Department of Applied Quantum Physics and Nuclear Engineering, Graduate School of Engineering, Kyushu University
  • MATSUYAMA Kanae
    Department of Applied Quantum Physics and Nuclear Engineering, Graduate School of Engineering, Kyushu University
  • HATA Satoshi
    Department of Engineering Sciences for Electronics and Materials, Faculty of Engineering Sciences, Kyushu University
  • MATSUMURA Syo
    Department of Applied Quantum Physics and Nuclear Engineering, Faculty of Engineering, Kyushu Univeristy

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  • 透過電子顕微鏡暗視野トモグラフィーによる規則合金ドメインの三次元観察
  • トウカ デンシ ケンビキョウ アンシヤ トモグラフィー ニ ヨル キソク ゴウキン ドメイン ノ 3ジゲン カンサツ

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Abstract

This paper shows a technique to acquire a tilt series of dark-field transmission electron microscopy (DFTEM) images for superlattice domains formed in ordering alloys. Fundamental points are as follows 1) use of a superlattice reflection with a relatively long extinction distance (small structure factor) to satisfy the projection requirement and 2) careful realignment of the electron beam to keep the diffraction condition during tilting the specimen. Tomographic reconstruction from the obtained DFTEM tilt series visualizes three-dimensional morphology and distribution of the superlattice domains, demonstrating the feasibility of the DFTEM tomography.

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