二次イオン質量分析法による絶縁物の分析

DOI Web Site

書誌事項

タイトル別名
  • Secondary ion mass spectrometry for insulators.
  • 2ジ イオン シツリョウ ブンセキホウ ニ ヨル ゼツエンブツ ノ ブンセキ

この論文をさがす

説明

Application of Secondary ion mass spectrometry (SIMS) to the study of chemical analyses of insulated materials is described. A simple working curve method is useful for the quantitative analyses of SIMS data. The sensivity acheaved is suffietient to concentration levels from ppm to ppb. This is demonstrated for the partition coefficients between olivine and magma and for the impuriry destribution in diamond thin film. A blieaf description of two demensional analyses is also made.

収録刊行物

詳細情報 詳細情報について

問題の指摘

ページトップへ