Finite-element Analysis of the Characteristics in Super High Pressure Mercury Vapor Lamp Bulbs under Internal Pressure

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  • 有限要素法による超高圧水銀放電灯バルブの耐内圧特性解析
  • ユウゲン ヨウソホウ ニ ヨル チョウコウアツ スイギン ホウデントウ バルブ ノ タイナイアツ トクセイ カイセキ

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Abstract

Super high pressure mercury discharge short arc lamps have been used as light sources for photolithography, such as patterning LCDs, PCBs and semiconductors. Normally, their bulbs are made of silica glass. This study evaluates optimal shapes for various lamp bulbs under internal pressure using the Finite Element Method (FEM). We obtained an optimal shape and the relationship between the fracture stress and the bulb thicknes. The optimal shape was obtained at 0.7≤D/L≤0.9, where L is the total length of the bulb and D is the diameter. To verify our computed results, we conducted static water pressure tests. We found simularities between the numerical results and experiments.

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