Two-stage-discharge ion source.

NUNOGAKI Masanobu, NAITO Masao, AKIMUNE Hideo

doi:10.1080/18811248.1979.9730886

A two-stage-discharge ion source is proposed, in which a source plasma is produced through two stages of plasma production : first, an electron beam-plasma-discharge; second, a kind of hollow-cathode arc discharge. The first stage discharge produces a plasma containing abundant hot electrons. The plasma is then fed into the second stage, where -at a fairly low hydrogen gas pressure (P<4 m Torr)-a stable discharge is maintained by means of a cylinder electrode. This cylinder electrode, connected to its own dc power supply, effectively serves to increase the ion density and to flatten its radial distribution. The source plasma generated by the foregoing two-stage-discharge permits the extraction of a high current ion beam of increased beam perveance. When a cylinder electrode of 6.5 cm diameter was used, the plasma ion density measured in the circular area of 4 cm diameter in front of the ion extraction aperture array was of an order of 10¹² cm^-3 with a radial density fluctuation within ±0.1%. A description is given of this source, together with an analysis of the function of hot electrons on ion beam formation. A preliminary experiment on ion beam formation from this source plasma succeeded in obtaining a continuous hydrogen ion beam of 1.17 A at an extraction voltage of 30 kV, with use of multiaperture electrodes provided with seven apertures each of 9 mm diameter. The ion beam had a current density of 260 mA.DC/cm².

Two-stage-discharge ion source.

この論文をさがす

説明

収録刊行物

キーワード

詳細情報詳細情報について

書き出し

問題の指摘

Two-stage-discharge ion source.

この論文をさがす

説明

収録刊行物

キーワード

詳細情報 詳細情報について

書き出し

問題の指摘

詳細情報詳細情報について