Development of New Carbon Thin Films. Heteroepitaxial Growth of Diamond Films.
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- TACHIBANA Takeshi
- Kobe Steel, Ltd., Electronics Res. Lab.
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- YOKOTA Yoshihiro
- Kobe Steel, Ltd., Electronics Res. Lab.
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- MIYATA Koichi
- Kobe Steel, Ltd., Electronics Res. Lab.
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- KOBASHI Koji
- Kobe Steel, Ltd., Electronics Res. Lab.
Bibliographic Information
- Other Title
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- 炭素系薄膜の最近の話題 ダイヤモンド薄膜のヘテロエピタキシャル成長
- ダイヤモンド ハクマク ノ ヘテロエピタキシャル セイチョウ
Search this article
Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 47 (5), 396-401, 1996
The Surface Finishing Society of Japan
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Details 詳細情報について
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- CRID
- 1390001204113818368
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- NII Article ID
- 10002256227
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- NII Book ID
- AN1005202X
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- ISSN
- 18843409
- 09151869
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- NDL BIB ID
- 3960060
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles