Silicon Etching Technologies
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- SATO Kazuo
- Graduate School of Eng., Nagoya Univ.
Bibliographic Information
- Other Title
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- シリコンエッチング技術 (1) シリコンエッチング技術
- シリコンエッチング ギジュツ
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Journal
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- Journal of The Surface Finishing Society of Japan
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Journal of The Surface Finishing Society of Japan 51 (8), 754-759, 2000
The Surface Finishing Society of Japan
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Details 詳細情報について
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- CRID
- 1390001204113838208
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- NII Article ID
- 10006249792
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- NII Book ID
- AN1005202X
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- COI
- 1:CAS:528:DC%2BD3cXlvFSisL8%3D
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- ISSN
- 18843409
- 09151869
- http://id.crossref.org/issn/09151869
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- NDL BIB ID
- 5445545
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles