書誌事項
- タイトル別名
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- Electrochemical Measurement of Ferric Chloride Spray Etching.
- エンカ ダイ 2 テツ ヨウエキ ニ ヨル スプレー エッチング ノ デンキ
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抄録
A study has been made of electrochemical techniques for the measurement of ferric chloride spray etching. Since, in spray etching, the limiting current is very high due to the violent agitation caused by the strong impingment of spray. The solution resistance of ferric chloride etchant was first determined by AC impedance technique to compensate for IR drop. Measurements of cathodic limiting current for the reduction of ferric ion at platinum ring-disk electrode on the impinged surface, were then made at spraying pressures of 25-98kPa and temperatures of 30-60°C. The spray etch rate of copper was proportional to the cathodic limiting current obtained in this study. The results indicate that the use of this technique makes possible the electrochemical monitoring of ferric chloride spray etching.
収録刊行物
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- 表面技術
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表面技術 43 (11), 1065-1069, 1992
一般社団法人 表面技術協会
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詳細情報 詳細情報について
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- CRID
- 1390001204113910784
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- NII論文ID
- 130001073009
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- NII書誌ID
- AN1005202X
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- COI
- 1:CAS:528:DyaK3sXmvVymsg%3D%3D
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- ISSN
- 18843409
- 09151869
- http://id.crossref.org/issn/09151869
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- NDL書誌ID
- 3798830
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可