エッチングしたアルミニウム箔表面に生成するバリヤー型アノード酸化皮膜の構造

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書誌事項

タイトル別名
  • The Structure of Barrier Anodic Oxide Films Growth on Etched Aluminum Foils.
  • エッチングシタ アルミニウム ハクヒョウメン ニ セイセイスル バリヤーカタ

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抄録

Ultramicrotomy was employed to prepare thin cross-sections of the barrier oxide films grown on etched aluminum foils for capacitor applications. It was found that the sections as thin as 10nm could be prepared successfully. Examination of the ultramicrotomed sections by transmission electron microscopy revealed a number of important structural features of the films that have not been reported previously. Of particular importance is that the nature and origin of film defects have been clarified and classified for the first time.

収録刊行物

  • 表面技術

    表面技術 42 (8), 844-847, 1991

    一般社団法人 表面技術協会

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