Noncontact Evaluation of Plated Layer Properties Using the Velocity Dispersion of Laser Surface Acoustic Waves.

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  • レーザ弾性表面波の速度分散解析によるめっき層特性の非接触評価
  • レーザ ダンセイ ヒョウメンハ ノ ソクド ブンサン カイセキ ニヨル メッキ

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Abstract

The purpose of this study is to evaluate the thickness, elastic constants, and bond quality of the electroplated metallic layer by using the quantitative analysis of the velocity dispersion of laser surface acoustic waves (SAWs). SAWs were nondestructively generated by a Q-switched YAG laser and monitored using a heterodyne laser interferometer, without inducing thermal damages. The group velocity dispersion obtained by wavelet transform was compared to the analytical velocity dispersion of Rayleigh and Lamb waves. The thickness and elastic stiffness of the well bond layer were estimated by quantitatively analyzing the velocity dispersion of the Rayleigh wave. The velocity dispersion of the 0th order symmetric and antisymmetric Lamb waves was used to estimate the thickness and quality of the delaminated layer. The bond quality could not be estimated, however, because the weak bond area was too small in comparison to the larger SAW propagation distance.

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