マイクロ波プラズマCVDにより合成した窒化炭素の摩擦摩耗特性

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書誌事項

タイトル別名
  • Friction and Wear Properties of Carbon Nitride Synthesized Using Microwave Plasma CVD
  • マイクロ波プラズマCVDにより合成した窒化炭素の摩擦摩耗特性 : CVDダイヤモンドに対する摩擦摩耗
  • マイクロハ プラズマ CVD ニ ヨリ ゴウセイ シタ チッカ タンソ ノ マサツ マモウ トクセイ : CVD ダイヤモンド ニ タイスル マサツ マモウ
  • ～CVDダイヤモンドに対する摩擦摩耗～
  • ～Friction and Wear against CVD Diamond～

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説明

Carbon nitride, which has fascinating properties such as high hardness and high current density of field emission, was investigated to elucidate the tribological properties of carbon nitride synthesized using microwave plasma CVD against CVD diamond. Carbon nitride was synthesized using microwave plasma CVD with a mixture of CH4-N2 gas used as a reaction gas. The CH4 flow rate was varied from 1 to 3 SCCM. Using a ball-on-disk friction tester, tribological properties of the deposits were estimated. Counterpart materials were CVD diamond film coated onto the SiC ball using microwave plasma CVD. Regarding the estimation of tribological properties, the lowest coefficient of about 0.05 against diamond was obtained for deposits made with a CH4 flow rate 2 SCCM. The wear depth was shallow against deposits synthesized in a CH4 flow rate of 2 SCCM. Results demonstrate that tribological properties of carbon nitride against diamond had a low friction coefficient. Deposits synthesized in a CH4 flow rate of 2 SCCM exhibited the shallowest wear depth.

収録刊行物

  • 表面技術

    表面技術 66 (5), 219-223, 2015

    一般社団法人 表面技術協会

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