Evaluation of Surface Roughness Parameters of Metal Films by Light Scattering Technique

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  • Naoi Yoshiki
    Department of Electrical and Electronic Engineering, Faculty of Engineering, The University of Tokushima
  • Fukui Masuo
    Department of Electrical and Electronic Engineering, Faculty of Engineering, The University of Tokushima

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  • Evaluation of Surface Roughness Paramet

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Abstract

Light scattering is a powerful method to evaluate surface roughness parameters. From the information on radiation produced by the surface roughness we are able to get a pair of roughness parameter, i.e. the amplitude of surface corrugation and the transverse correlation length. However, the parameters evaluated by such a way cannot explain the whole angular distribution of scattered light intensity. We show that the angular distribution of scattered light intensity can be properly explained by a combination of several parameters.

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