Influence of Growth Conditions on Amorphous Germanium Films Prepared by Vacuum-Evaporation

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  • Influence of Growth Conditions on Amorp

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Amorphous germanium films under various growth conditions are investigated by X-ray diffraction and the method of densimetry. The density decreases continuously with decreasing deposition rate, and when the deposition rate ranges from 1.7×10−3 to 5.1 nm/s, the density changes from 2.77 to 4.63 g/cm3. Furthermore, the densities are 2.91 g/cm3 at a pressure of 0.12 Pa and ∼4.3 g/cm3 at ∼10−4 Pa under the same deposition rate of 0.38 nm/s. It can be concluded that the most possible origin for the low density is the existing residual gas.

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