Chemical structural analysis of diamondlike carbon by X-ray photoelectron spectroscopy
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- Takabayashi Susumu
- Department of Quantum Matter, Graduate School of Advanced Sciences of Matter, Hiroshima University
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- Okamoto Keishi
- Department of Quantum Matter, Graduate School of Advanced Sciences of Matter, Hiroshima University Toyo Advanced Technologies Co., Ltd.
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- Nakatani Tatsuyuki
- Toyo Advanced Technologies Co., Ltd.
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- Sakaue Hiroyuki
- Department of Quantum Matter, Graduate School of Advanced Sciences of Matter, Hiroshima University
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- Takahagi Takayuki
- Department of Quantum Matter, Graduate School of Advanced Sciences of Matter, Hiroshima University
Bibliographic Information
- Other Title
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- X線光電子分光法を用いたダイヤモンドライクカーボンの化学構造解析
- Xセン コウデンシ ブンコウホウ オ モチイタ ダイヤモンドライク カーボン ノ カガク コウゾウ カイセキ
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Abstract
Diamondlike carbon (DLC) is an amorphous carbonaceous material composed of sp2 carbon, sp3 carbon, and hydrogen.We have analyzed the chemical structure of DLC by using X-ray photoelectron spectroscopy (XPS). In this paper, we reviewed our DLC analysis. The C ls spectra of the DLC films were analyzed using the Doniach-Šunjic function convoluted with a Gaussian function. The spectra were decomposed into four components as follows: sp3 carbon with carbon-carbon bonds (C-C sp3 carbon, 283.8 eV), sp2 carbon with carbon-carbon bonds (C-C sp2 carbon, 284.3 eV), sp2 carbon with hydrogen-carbon bonds (H-C sp2 carbon, 284.8 eV), and sp3 carbon with hydrogen-carbon bonds (H-C sp3 carbon, 285.3 eV).
Journal
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- TANSO
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TANSO 2008 (235), 280-289, 2008
THE CARBON SOCIETY OF JAPAN
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Details 詳細情報について
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- CRID
- 1390001204226170368
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- NII Article ID
- 130004121543
- 10024451143
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- NII Book ID
- AN00140335
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- ISSN
- 18845495
- 03715345
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- NDL BIB ID
- 9722451
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed