New Anomalous Grazing X-ray Reflection Method for Determining the Atomic Number Density in Multi-layered Thin Film
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- Saito Masatoshi
- Institute for Advanced Materials Processing, Tohoku University
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- Waseda Yoshio
- Institute for Advanced Materials Processing, Tohoku University
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A new method has been proposed for determining the atomic number density of a specific element in multi-layered thin films using grazing X-ray reflection and anomalous dispersion effect with the help of the Fourier filtering technique. The essential equations for analyzing the measured reflection data using the anomalous grazing X-ray reflectometry (AGXR) were given and the capability of this new method was demonstrated by obtaining the atomic number densities of constituents in a multi-layered thin film consisting of GaAs/AlAs/GaAs heterostructure.
収録刊行物
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- Materials Transactions, JIM
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Materials Transactions, JIM 40 (10), 1044-1049, 1999
社団法人 日本金属学会
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詳細情報 詳細情報について
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- CRID
- 1390001204248081152
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- NII論文ID
- 130003557102
- 10005356815
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- NII書誌ID
- AA10699969
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- COI
- 1:CAS:528:DyaK1MXnslOjtb8%3D
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- ISSN
- 2432471X
- 09161821
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- NDL書誌ID
- 4885743
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
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- 使用不可