Ti-Al, Graded Al/AlTi, and Ti-Al-N Coatings Prepared by Supersonic Free-Jet PVD
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- Yumoto Atsushi
- Department of Mechanical Systems Engineering, Faculty of Engineering, Kogakuin University
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- Yamamoto Takahisa
- Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo
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- Hiroki Fujio
- Department of Mechanical Systems Engineering, Faculty of Engineering, Kogakuin University
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- Shiota Ichiro
- Department of Materials Science and Technology, Faculty of Engineering, Kogakuin University
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- Niwa Naotake
- Department of Mechanical Systems Engineering, Faculty of Engineering, Kogakuin University
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The authors previously developed Supersonic Free-Jet PVD (SFJ-PVD) as a new coating method in which a coating film is formed by depositing nanoparticles at very high velocity onto a substrate. This SFJ-PVD provides a rapid deposition rate and produces a mixture of different kinds of nanoparticles formed in different evaporation chambers on the substrate. This paper describes the preparation of graded Al/AlTi, Ti-Al, and Ti-Al-N coating films with SFJ-PVD. Ti-50 at%Al film and graded Al/AlTi film are produced by depositing Al and Ti nanoparticles formed in different evaporation chambers with the controlled evaporation rates of Al and Ti. Ti-Al-N film is produced by depositing nanoparticles formed in the evaporation chamber with a controlled partial pressure of N2 in an atmosphere of He. Mixing Ti and Al nanoparticles by depositing them onto a substrate produces in-situ syntheses of γ-TiAl and α2-Ti3Al intermetallic compounds on the substrate regardless of the substrate temperature in these experimental conditions. A smooth, compact, and defect-free structure is formed both at the interface between the substrate and the coating films and inside the coating films. XRD analysis reveals the crystal structure of the Ti-Al-N film to be TiN, Ti3Al2N2, Ti3AlN, and AlN.
収録刊行物
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- MATERIALS TRANSACTIONS
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MATERIALS TRANSACTIONS 45 (5), 1620-1623, 2004
公益社団法人 日本金属学会
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詳細情報 詳細情報について
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- CRID
- 1390001204249510912
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- NII論文ID
- 10013071576
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- NII書誌ID
- AA1151294X
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- COI
- 1:CAS:528:DC%2BD2cXkvFyjtbY%3D
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- ISSN
- 13475320
- 13459678
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- NDL書誌ID
- 6951453
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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