Fabrication and Characterization of GaP Photonic Crystals for Terahertz Wave Application
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- Tanabe Tadao
- Department of Materials Science, Graduate School of Engineering, Tohoku University
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- Oyama Yutaka
- Department of Materials Science, Graduate School of Engineering, Tohoku University
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- Suto Ken
- Semiconductor Research Institute
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- Nishizawa Jun-ichi
- Semiconductor Research Institute
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- Sasaki Tetsuo
- Semiconductor Research Institute
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- Kimura Tomoyuki
- Semiconductor Research Institute
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We have fabricated GaP two-dimensional photonic crystals (PCs) for terahertz (THz) wave generation by a reactive ion etching in Ar/Cl2 gas chemistries. We performed 75-μm-deep etching of GaP, in which Al2O3 layer is applied as a hard mask with its selectivity as high as 125. We demonstrated the THz-wave generation from the fabricated GaP slab waveguide with the PC structure as a cladding layer under a collinear phase-matched difference frequency generation. In the frequency dependence of THz output power for the PC slab waveguide is seen at around 1.1 THz. From the in-plane transmission spectrum of THz-wave, we confirmed that the THz output characteristics had relation with the photonic structure for THz wave.
収録刊行物
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- MATERIALS TRANSACTIONS
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MATERIALS TRANSACTIONS 48 (9), 2340-2342, 2007
公益社団法人 日本金属学会
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詳細情報 詳細情報について
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- CRID
- 1390001204250040064
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- NII論文ID
- 10019853336
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- NII書誌ID
- AA1151294X
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- ISSN
- 13475320
- 13459678
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- NDL書誌ID
- 8884823
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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