Accuracy of Total Reflection X-Ray Fluorescence Spectrometry near the Detection Limit.
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- MORI Yoshihiro
- Advanced Technology Research Laboratories, Nippon Steel Corporation
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- KUBOTA Kazuhiko
- Advanced Technology Research Laboratories, Nippon Steel Corporation
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- SHIMANOE Kengo
- Advanced Technology Research Laboratories, Nippon Steel Corporation
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- SAKON Tadashi
- Advanced Technology Research Laboratories, Nippon Steel Corporation
Bibliographic Information
- Other Title
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- Accuracy of Total Reflection X-Ray Fluo
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Abstract
Total reflection X-ray fluorescence spectrometry (TXRF) is one of the most common tools to analyze metal contaminants on silicon wafers and other substrate surfaces. Although the detection limit of commercial TXRF was improved to the concentration region of 109 atoms cm-2, its accuracy at low concentration was not yet clarified until now. In this paper, we examine the accuracy of the quantitative analysis by TXRF under 1011 atoms cm-2 for Fe, Ni, Cu and Zn. In particular, four factors (standard sample, reference analyzing method, compensation of spurious peak and peak separation) are considered. Under a controlled condition, the accuracy is within 20% as compared with atomic absorption spectropho-tometry (AAS).
Journal
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- Analytical Sciences
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Analytical Sciences 14 (2), 275-280, 1998
The Japan Society for Analytical Chemistry
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Details 詳細情報について
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- CRID
- 1390001204254583680
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- NII Article ID
- 130004439801
- 10002414984
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- NII Book ID
- AA10500785
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- COI
- 1:CAS:528:DyaK1cXislGmtr4%3D
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- ISSN
- 13482246
- 09106340
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- NDL BIB ID
- 4450407
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed