Visible-Light-Sensitive Photo-Acid Generator Incorporating Food Dye for Use in Chemically Amplified Resists
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- Tarumoto Naohiro
- Hodogaya Chemical Co., Ltd.
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- Miyagawa Nobukazu
- Department of Information and Image Sciences, Faculty of Engineering, Chiba University
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- Takahara Shigeru
- Department of Information and Image Sciences, Faculty of Engineering, Chiba University
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- Yamaoka Tsuguo
- Department of Information and Image Sciences, Faculty of Engineering, Chiba University
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Abstract
Diphenyliodonium 4-(3-N,N-diethylamino-6-diethyliminium-9-xantenyl)-3-sulfonato-phenylsulfonate was designed and prepared. The diphenyliodonium salt with a food dye as a counter anion showed good thermal stability, and had a decomposition temperature of 201.1°C. From the results of our investigation, the mechanism of acid generation is considered to be intramolecular electron transfer from the excited dye moiety to the iodonium. The photosensitivities of the photopolymer with a tetrahydropyranyl protecting group were 2.09 and 0.84 J/cm2 at 488 nm and 514 nm, respectively.
Journal
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 18 (6), 673-677, 2005
The Society of Photopolymer Science and Technology(SPST)
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Details 詳細情報について
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- CRID
- 1390001204323562240
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- NII Article ID
- 130004464457
- 40007066654
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- NII Book ID
- AA11576862
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- ISSN
- 13496336
- 09149244
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- NDL BIB ID
- 7757661
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed