Preparation of photo-curing acrylate thin films containing Pd nanoparticles and their application for e1ectroless plating catalysts

DOI Web Site Web Site 被引用文献6件 参考文献6件

書誌事項

タイトル別名
  • Preparation of Photo-curing Acrylate Thin Films containing Pd Nanoparticles and their Application for Electroless Plating Catalysts

この論文をさがす

抄録

A novel strategy to fabricate the copper pattem by electroless copper plating was investigated. The photolithographic negative pattems were fabricated by the hybrid f11ms with the palladium nanoparticles. The palladium nanoparticles in photo-cured acrylate thin films were an effective catalyst for the electroless copper plating, and it was easily to form the catalysis flne patterns by UV irradiation and development. Addition of silica nanoparticles to the hybrid thin fllms enhanced the performance of catalyst for the electroless copper plating and adhesion between the thin f11m and deposited copper.

収録刊行物

被引用文献 (6)*注記

もっと見る

参考文献 (6)*注記

もっと見る

キーワード

詳細情報 詳細情報について

問題の指摘

ページトップへ