Cyclized Copolymer of Methacrylic Anhydride and an Application to Photoresist with Photo-Acid Generator.

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  • Takao Yasuyuki
    Department of Information and Image science, Faculty of Engineering, Chiba University
  • Miyagawa Nobukazu
    Department of Information and Image science, Faculty of Engineering, Chiba University
  • Takahara Shigeru
    Department of Information and Image science, Faculty of Engineering, Chiba University
  • Yamaoka Tsuguo
    Department of Information and Image science, Faculty of Engineering, Chiba University

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The cyclized copolymerization of methacrylic anhydride with N phenyldimethacryl- amide and methacrylonitrile was carried out. The polymer consists of six-membered cyclic acid anhydride and five-membered imide ring. The cyclic acid anhydride was hydrolyzed by generated acid catalyst from photo-acid generator (PAG). The hydrolyzed copolymer is dissolved in an alkaline solution. We applied this copolymer with PAG to photoresist based on the chemical amplified system and obtained good patterns of positive- tone image.

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