Development and Evaluation of the Binary Hologram Master

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The binary hologram master with two-layer refractive index was developed and evaluated of their characteristics. The chirped diffraction grating was fabricating by electron-beam lithography. The grating structure has a one-dimensional grating with a period of 0.26 μm. The polarization separation lenses consist of two-layer, substrate materials and coated on thin-film materials. Example designs are presented, and the conventional diffraction analysis is used to evaluate the performance of these gratings. As an example, measurement of two-layer film is carried out and excellent confirmation is obtained.

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