Plasma polymerization of perfluoroalkanes over zeolite membrane and the gas permeability of the membrane.

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  • KITA HIDETOSHI
    Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University
  • SHIGEKUNI MASANOBU
    Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University
  • TANAKA KAZUHIRO
    Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University
  • OKAMOTO KEN-ICHI
    Department of Advanced Materials Science and Engineering, Faculty of Engineering, Yamaguchi University
  • KAWAFUNE ISAO
    Osaka Municipal Technical Research Institute

抄録

Plasma polymerization of perfluoro-n-hexane, hexafluoroethane and tetrafluoromethane is investigated. The deposition rate of plasma- polymerized perfluoro-n-hexane increased with increasing discharge power up to 40W and then sharply decreased, while hexafluoroethane and tetrafluoromethane hardly polymerized. Addition of hydrogen or methane increased the polymer deposition rate because of hydrogen scavenging of fluorine atoms formed in the plasma.. A maximum in the deposition rate was observed in the 40 mol% hydrogen or in the 20 mol% methane addition to perfluoro-n-hexane or hexafluoroethane. FTIR and XPS spectra showed plasma-polymerized membranes have the crosslinking structure. The gas permeation through plasma-polymerized membranes deposited on zeolite, alumina-gel membrane and porous polycarbonate substrate is also reported.

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