Evaluation of Template Release Energy with Use of Fluorinated Segregation Agents for UV Nanoimprint Resists
-
- Nakamura Naoto
- Graduate School of Engineering, Osaka Prefecture University
-
- Yamashita Tsuneo
- Chemical R&D Center, Daikin Industries, Ltd.
-
- Kitagawa Takuya
- Graduate School of Engineering, Osaka Prefecture University
-
- Kawata Hiroaki
- Graduate School of Engineering, Osaka Prefecture University
-
- Shirai Masamitsu
- Graduate School of Engineering, Osaka Prefecture University
-
- Hirai Yoshihiko
- Graduate School of Engineering, Osaka Prefecture University
この論文をさがす
抄録
Quantitative evaluation of template release energy is reported for UV nanoimprint resists containing various kinds of fluorinated segregation agents. The template release energy is evaluated based on fracture mechanics for various types of UV curable resists in which a fluorinated segregation agent is dissolved. The template release energy is effectively reduced. The higher molecular weight agent containing a hydrophilic group effectively reduces the energy by 5/6th. The defect ratio in nanoimprint lithography is also examined. The result shows that the defect ratio is effectively reduced by the use of fluorinated segregation agents.
収録刊行物
-
- Journal of Photopolymer Science and Technology
-
Journal of Photopolymer Science and Technology 27 (1), 111-115, 2014
フォトポリマー学会
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390001204324796800
-
- NII論文ID
- 130004678311
-
- NII書誌ID
- AA11576862
-
- ISSN
- 13496336
- 09149244
-
- NDL書誌ID
- 025604472
-
- 本文言語コード
- en
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可