Self-Consistent Field Theory of Directed Self-Assembly on CH Pitch Division
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- Tominaga Tetsuo
- JSR Corporation
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- Minegishi Shinya
- JSR Corporation
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- Komatsu Hiroyuki
- JSR Corporation
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- Naruoka Takehiro
- JSR Corporation
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- Nagai Tomoki
- JSR Corporation
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- Izumi Kenichi
- JSR Corporation University of California Santa Barbara
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- Fredrickson Glenn H.
- University of California Santa Barbara
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We have done SCFT simulations to investigate the directed self-assembly on CH pitch division. The structural change by the thickness Lz of oval prepattern reveals that perpendicular cylinders are favored when Lz is not commensurate with the distance between cylinders L0. In this case linear rows of cylinders are along major radius for narrow ovals, and wider ovals tend to pack additional rows of cylinders in a staggered hexagonal arrangement. Sweeping from neutral to PMMA attractive substrates causes a transition from cylinders that penetrate completely through the film, to cylinders that terminate in nearly spherical caps. Thus a neutral substrate would be favorable in order to get cylinders that penetrate completely through the film.
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 27 (1), 49-52, 2014
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詳細情報 詳細情報について
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- CRID
- 1390001204324827136
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- NII論文ID
- 130004678318
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- NII書誌ID
- AA11576862
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- ISSN
- 13496336
- 09149244
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- NDL書誌ID
- 025604326
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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