Influence of Monomer Sequence of Binder Polymers for Lithographic Property of Photodefinable Nanocomposites

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  • Murakami Yasuharu
    Telecommunication Materials Development Center, Hitachi Chemical Co., Ltd., Tsukuba Research Laboratory

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Abstract

The relationship of binder polymer compositions and lithographic properties was examined and following conclusions were obtained; (1) The alternating sequence of binder polymer is preferable to the nanocomposite of excellent transparency. (2) The moiety of methacrylic acid is necessary to be 50% or more for the residue-free patterning. (3) Photo-definable nanocomposite composed of alternating copolymer and nano titania gives a patternable nanocomposite with high refractive index.

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