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- Shinohara Hidetoshi
- Nano Processing System Division, Toshiba Machine Co., Ltd.
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- Fujiwara Shigeru
- Nano Processing System Division, Toshiba Machine Co., Ltd.
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- Tashiro Takaharu
- Nano Processing System Division, Toshiba Machine Co., Ltd.
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- Kitahara Hidetoshi
- Nano Processing System Division, Toshiba Machine Co., Ltd.
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- Goto Hiroshi
- Nano Processing System Division, Toshiba Machine Co., Ltd.
この論文をさがす
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 26 (1), 113-117, 2013
フォトポリマー学会
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詳細情報 詳細情報について
-
- CRID
- 1390001204325433344
-
- NII論文ID
- 130004465001
- 40019685668
-
- NII書誌ID
- AA11576862
-
- COI
- 1:CAS:528:DC%2BC3sXhtFalu7%2FO
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- ISSN
- 13496336
- 09149244
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- NDL書誌ID
- 024660483
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles