Evaluation of Template Releasing Energy in Nanoimprint Lithography

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  • Nishino Tomoki
    Osaka Prefecture University, Department of Physics and Electronics Engineering, Graduate School of Engineering Japan Science and Technology Agency, CREST(Core Research of Evolutional Science & Technology)
  • Fujita Honoka
    Osaka Prefecture University, Department of Physics and Electronics Engineering, Graduate School of Engineering
  • Kawata Hiraoka
    Osaka Prefecture University, Department of Physics and Electronics Engineering, Graduate School of Engineering Japan Science and Technology Agency, CREST(Core Research of Evolutional Science & Technology)
  • Hirai Yoshihiko
    Osaka Prefecture University, Department of Physics and Electronics Engineering, Graduate School of Engineering Japan Science and Technology Agency, CREST(Core Research of Evolutional Science & Technology)

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To investigate template releasing process in nanoimprint lithography, template releasing energy from resist polymer is evaluated under various conditions using test rig. The template releasing energy is proportional to the surface energy of the template, however it does not depend on rigidness of the system and template lifting speed.

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