Spin-on Glass as Perpendicular Orientation Control Layer for Block Copolymer

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Abstract

A spin-on-glass (SOG) film, which can serve as a perpendicular orientation control layer for direct self-assembly (DSA) using a block copolymer (BCP) was developed. A lamellar pattern and a cylindrical pattern made of polystyrene polymethylmethacrylate diblock copolymer (PS-b-PMMA) were oriented perpendicularly on the SOG film. The SOG film also can be applied to the upper layer of tri-resist process. It was also found that contact angles of water could not be used as indices of surface energies quantitatively in the case of the SOG films.

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