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- Goto Yusuke
- Research Laboratory for Integrated Technological Systems, Kanazawa Institute of Technology
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- Angata Yukihiro
- Research Laboratory for Integrated Technological Systems, Kanazawa Institute of Technology
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- Yamamoto Masashi
- Research Laboratory for Integrated Technological Systems, Kanazawa Institute of Technology
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- Seki Toshio
- Department of Nuclear Engineering, Kyoto University
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- Matsumoto Jiro
- Quantum Science and Engineering Center, Kyoto University
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- Horibe Hideo
- Research Laboratory for Integrated Technological Systems, Kanazawa Institute of Technology The Institute of Scientific and Industrial Research, Osaka University
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抄録
We have investigated the removal of poly vinyl phenol (PVP) into which was B, P and As ions implanted with a dose of 5×1013~5×1015 atoms/cm2 at 70keV, using wet ozone. Also, we investigated the thickness of altered layer of ion-implanted PVP using Secondary Ion Mass Spectrometry (SIMS). We investigated the chemical reactivity of wet ozone and ion-implanted PVP by FT-IR. The removability of ion-implanted PVP using wet ozone decreased with increasing dose because the degrees of alteration of benzene ring and O-H group increase with increasing dose. From the results of SIMS, the thickness of altered layer of B-ion-implanted PVP was 387nm, that of P-ion-implanted PVP was 232nm, and that of As-ion-implanted PVP was 142nm. However, the degree of alteration should increase in order of B, P and As, because any samples were implanted at same acceleration energy (70keV). FT-IR indicated that benzene ring content percentage was almost same at removed and not removed. On the other hand, in O-H group, there is a clear difference at removed and not removed, O-H group content percentage decreased drastically at implanted PVP with a dose of 5×1014 atoms/cm2 over. Therefore, the removability of ion-implanted PVP using wet ozone depends on O-H group content than that of benzene ring.
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 26 (4), 467-472, 2013
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詳細情報 詳細情報について
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- CRID
- 1390001204325565568
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- NII論文ID
- 130004833519
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- NII書誌ID
- AA11576862
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- COI
- 1:CAS:528:DC%2BC3sXhtFCmtL3E
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- ISSN
- 13496336
- 09149244
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- NDL書誌ID
- 024660105
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可