Investigation of Polymer-bound PAGs: Synthesis, Characterization and Initial Structure/Property Relationships of Anion-bound Resists
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- Allen Robert D.
- IBM Almaden Research Center
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- Brock Phillip J.
- IBM Almaden Research Center
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- Na Young-Hye
- IBM Almaden Research Center
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- Sherwood Mark H.
- IBM Almaden Research Center
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- Truong Hoa D.
- IBM Almaden Research Center
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- Wallraff Gregory M.
- IBM Almaden Research Center
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- Fujiwara Masaki
- Central Glass assignee at IBM Almaden Research Center
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- Maeda Kazuhiko
- Central Glass Corp.
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Description
A study of polymerization and some of the resulting properties of PAG-bound resist polymers based on a new triphenyl sulfonium fluoroalkyl sulfonate-containing methacrylate monomer is reported here. A low activation ester terpolymer containing this onium salt monomer was prepared and characterized. Our findings include the profound impact of residual monomer in the behavior of this material and the critical importance of polymer purification to remove unreacted ionic monomers in the preparation of polymer-bound PAGs. We have developed a polymer isolation process specifically tailored to remove unbound PAG so that the properties could be unambiguously investigated. And we report here the influence on properties of bound vs unbound PAG in this chemically amplified resist.
Journal
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 22 (1), 25-29, 2009
The Society of Photopolymer Science and Technology(SPST)
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Keywords
Details 詳細情報について
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- CRID
- 1390001204325581952
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- NII Article ID
- 130004464711
- 40016635390
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- NII Book ID
- AA11576862
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- COI
- 1:CAS:528:DC%2BD1MXosl2gs7o%3D
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- ISSN
- 13496336
- 09149244
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- NDL BIB ID
- 10269876
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed