Development of a Chemically Amplified Photosensitive Polyimide Based on Poly(amic acid), a Dissolution Inhibitor, and a Photoacid Generator
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- Sugiyama Masy
- Department of Organic and Polymeric Materials, Graduate School of Science and Engineering, Tokyo Institute of Technology
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- Ogura Tomohito
- Department of Organic and Polymeric Materials, Graduate School of Science and Engineering, Tokyo Institute of Technology
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- Higashihara Tomoya
- Department of Organic and Polymeric Materials, Graduate School of Science and Engineering, Tokyo Institute of Technology
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- Ueda Mitsuru
- Department of Organic and Polymeric Materials, Graduate School of Science and Engineering, Tokyo Institute of Technology
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A chemically amplified photosensitive polyimide (PSPI) based on poly(amic acid) (PAA), 9,9-bis[4-(tert-butoxycarbonylmethyloxy)phenyl]fluorene (TBMPF) as a dissolution inhibitor, and (5-propylsulfonyloxyimino-5H-thiophene-2-ylidene)-(2-methylphenyl)actonitrile (PTMA) as a photoacid generator has been developed. The PAA was prepare from 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (6FDA) and 2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane (6FAPP). The PSPI consisting of PAA (84 wt%), TBMPF (8 wt%), and PTMA (8 wt%) showed high sensitivity of 45 mJ/cm2 and high contrast of 12, when it was exposed to a 435 nm line (g-line), postbaked at 110 °C for 2 min, and developed with an aqueous alkaline developer, 2.38 wt% tetramethylammonium hydroxide solution with 5 wt% iso-propanol at 25 °C. A clear positive image of 4μm line and space pattern was printed on a film exposed to 200 mJ/cm2 of g-line by a contact printing method and converted into the polyimide pattern upon heating at 250 °C for 1 h.
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 23 (4), 483-488, 2010
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詳細情報 詳細情報について
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- CRID
- 1390001204325625984
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- NII論文ID
- 130004833352
- 40017186879
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- NII書誌ID
- AA11576862
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- COI
- 1:CAS:528:DC%2BC3cXpsVOiurc%3D
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- ISSN
- 13496336
- 09149244
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- NDL書誌ID
- 10736432
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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