- 【Updated on May 12, 2025】 Integration of CiNii Dissertations and CiNii Books into CiNii Research
- Trial version of CiNii Research Automatic Translation feature is available on CiNii Labs
- Suspension and deletion of data provided by Nikkei BP
- Regarding the recording of “Research Data” and “Evidence Data”
A Dynamic System to evaluate the UV Shrinkage Characteristics of UV Photopolymers used for Nanoimprint
-
- Wang Qing
- National Institute of Advanced Industrial Science and Technology (AIST) JST, CREST
-
- Hiroshima Hiroshi
- National Institute of Advanced Industrial Science and Technology (AIST) JST, CREST
-
- Atobe Hidemasa
- National Institute of Advanced Industrial Science and Technology (AIST) JST, CREST Tokyo University of Science
Search this article
Description
Knowledge of shrinkage is important for fabricating a successful replication with high resolution and optimizing the conditions of a UV nanoimprint process. A dynamic system to evaluate the UV shrinkage characteristics of photo-curable resin is proposed to study the shrinkage of the UV photo-curable resin with UV exposure time. This system provides a way to evaluate not only the saturation resin shrinkage induced by UV exposure, but also in-situ dynamic shrinkage with a time resolution of 100us. It is found that the shrinkage-induced displacement of thin film resin by UV exposure has a linear relation with the thickness of the thin film resin. The shrinkage of PAK-01 resin at 250mJ/cm2 is approximately 8.4% by fitting the displacement data using a linear model. The dynamic shrinkage analysis reveals that the stronger UV intensity gives a lower conversion rate at the same exposure dose.
Journal
-
- Journal of Photopolymer Science and Technology
-
Journal of Photopolymer Science and Technology 23 (1), 33-38, 2010
The Society of Photopolymer Science and Technology(SPST)
- Tweet
Details 詳細情報について
-
- CRID
- 1390001204325939200
-
- NII Article ID
- 130004833331
- 40017186827
-
- NII Book ID
- AA11576862
-
- ISSN
- 13496336
- 09149244
-
- NDL BIB ID
- 10737298
-
- Text Lang
- en
-
- Data Source
-
- JaLC
- NDL Search
- Crossref
- CiNii Articles
- OpenAIRE
-
- Abstract License Flag
- Disallowed