Photochemical Proton Generation Mechanism in Poly-methacrylate Resist Films.
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- Ohmori Norihito
- Laboratory of Physical Chemistry, Faculty of Pharmaceutical Sciences, Chiba University
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- Hata Masayuki
- Laboratory of Physical Chemistry, Faculty of Pharmaceutical Sciences, Chiba University
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- Hoshino Tyuji
- Laboratory of Physical Chemistry, Faculty of Pharmaceutical Sciences, Chiba University
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- Tsuda Minoru
- Laboratory of Physical Chemistry, Faculty of Pharmaceutical Sciences, Chiba University
Bibliographic Information
- Other Title
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- Photochemical Proton Generation Mechani
Search this article
Journal
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 11 (3), 395-398, 1998
The Society of Photopolymer Science and Technology(SPST)
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Keywords
Details 詳細情報について
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- CRID
- 1390001204325947776
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- NII Article ID
- 130003488082
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- NII Book ID
- AA11576862
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- COI
- 1:CAS:528:DyaK1cXkvVGqtb0%3D
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- ISSN
- 13496336
- 09149244
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- NDL BIB ID
- 4525911
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
