Analysis of small holes using the replica method

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  • レプリカ法による微小穴形状の解析
  • レプリカ法による微小穴形状の解析 : 研削加工で形成したガラス穴の測定と解析
  • レプリカホウ ニ ヨル ビコアナ ケイジョウ ノ カイセキ : ケンサク カコウ デ ケイセイ シタ ガラス アナ ノ ソクテイ ト カイセキ
  • 研削加工で形成したガラス穴の測定と解析
  • Measurement and analysis of inner feature of glass hole made by grinding

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Abstract

It is impossible to measure the internal shape of small glass holes using a sensing needle. The glass holes must be cut to expose the inward facing surface of the holes outward. However, cutting the glass takes too much time and is expensive. This research was performed to determine the effectiveness of the replica method, which involves indirect measurement of the inner shape of small holes using a replica. We first made small glass holes by grinding with ultrasonic vibration. Next, we made a replica which translates the inward facing surface of the glass hole outward. Then, we measured the replica using a non-contact measurement machine. Finally, we analyzed the data and obtained information regarding the diameter, roundness profile, and roughness curve of the replica. This research confirmed the effectiveness of the replica method.

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