プラズマ原子発光分析による微粒子の粒径・組成同時計測

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  • Simultaneous Determination of Particle Size and Chemical Composition with Plasma Atomic Emission Analysis
  • プラズマ ゲンシ ハッコウ ブンセキ ニ ヨル ビリュウシ ノ リュウケイ ソセイ ドウジ ケイソク

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Information on the distribution of chemical composition with respect to particle size is necessary in various fields of aerosol research. Particle analyzer system using helium microwave-induced plasma (He-MIP) can simultaneously measure the composition and size of individual particles without any preparation, but the plasma is relatively unstable because of its low plasma capacity. We have overcome this difficulty by devising new single particle introduction system for He-MIP. Furthermore, we have developed a high-sensitivity in-situ measurement technology using Laser Induced Breakdown Spectroscopy (LIBS). This measurement technology couples new particle-plasmatizing technique with high-sensitivity measurement of photons from visible to ultraviolet wavelength bands emitted from the plasma, therefore allowing simultaneous stable measurement of particle size and composition as required in various processes.

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