エアロゾルデポジション法による透明電気光学薄膜

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  • Electro-Optic Transparent Films Prepared by Aerosol Deposition
  • エアロゾル デポジションホウ ニ ヨル トウメイ デンキ コウガク ハクマク

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We developed functional oxide films with a large electro-optic (EO) effect for use in very small, low-power EO conversion devices. We have applied an aerosol deposition (AD) to form lead oxide films with a perovskite structure. (Pb, La) (Zr,Ti) O3 films were deposited and systematically studied in terms of optical and EO properties. Transparent films with a large EO effect, which have acceptable transmittance loss level for use as optical devices, were obtained. In this report, we summarize recent progress and future prospects on AD for optical devices application.

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