書誌事項
- タイトル別名
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- Improved Impinger Air Sampling Method by Using Highly Hydrophilic Surface and its Application to Automatic Monitor for Acidic or Basic Contaminations in Cleanroom Air
- コウシンスイ ヒョウメン オ リヨウ シタ カイリョウ インピンジャーホシュウホウ ト コレ オ モチイタ クリーンルーム クウキ チュウ ノ サンセイ エンキセイ オセン ブッシツ ノ ジドウ モニタ
この論文をさがす
説明
We have developed an automatic air monitoring apparatus for measuring trace amounts of acidic or basic contaminants in clean room air. The apparatus includes an ion chromatograph and uses a new air sampling method. Its absorbing vessel is a tube made of quartz glass whose inner surface is cleaned with ultraviolet light so as to be highly hydrophilic. When an air sample is bubbled into 6 ml of absorbing water, the bubbles rise stably to the upper part of the tube and the inner surface is coated with water film. Since the air sample has sufficient contact with the absorbing water, analytical components can be effectively absorbed into the water. It takes 27 min to analyze a sample consisting of organic and inorganic acid of more than 0.1 μg/m3 in air.
収録刊行物
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- エアロゾル研究
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エアロゾル研究 17 (2), 83-88, 2002
日本エアロゾル学会
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詳細情報 詳細情報について
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- CRID
- 1390001204343584000
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- NII論文ID
- 10008837078
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- NII書誌ID
- AN10041511
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- COI
- 1:CAS:528:DC%2BD38XlsVahsLs%3D
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- ISSN
- 1881543X
- 09122834
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- NDL書誌ID
- 6193513
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可