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- KOBAYASHI Ichizo
- Tsukuba Laboratory, Nippon Sanso Corp.
Bibliographic Information
- Other Title
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- MOCVD原料としての高純度[Ti(dpm)2(i-C3H70)2]の合成
- Synthesis of Highly Pure (Ti(dpm)2(i-C3H7O)2) as a Source for MOCVD.
Abstract
A dipivaroylmethane (Hdpm) chelate of titanium(N), [T, i(dpm)2(i-C3H70)2] was synthesized by the reaction of tetraisopropoxytitanium(N) with Hdpm in a nonaqueous solvent under a highly pure argon atmosphere and characterized by means of ICP, elemental analyses, FT-IR, 13C-NMR, and TG-DTA. The product was proved to be sufficiently pure so as to be used as a good source of MOCVD for the preparation of ferroelectric thin films.
Journal
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- NIPPON KAGAKU KAISHI
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NIPPON KAGAKU KAISHI 1993 (4), 404-407, 1993-04-10
The Chemical Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390001204388467584
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- NII Article ID
- 130004060850
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- ISSN
- 21850925
- 03694577
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed