MOCVD原料としての高純度[Ti(dpm)2(i-C3H70)2]の合成

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タイトル別名
  • Synthesis of Highly Pure [Ti(dPm)2(i-C31-170)2] as a Source for MOCVD
  • Synthesis of Highly Pure (Ti(dpm)2(i-C3H7O)2) as a Source for MOCVD.

抄録

A dipivaroylmethane (Hdpm) chelate of titanium(N), [T, i(dpm)2(i-C3H70)2] was synthesized by the reaction of tetraisopropoxytitanium(N) with Hdpm in a nonaqueous solvent under a highly pure argon atmosphere and characterized by means of ICP, elemental analyses, FT-IR, 13C-NMR, and TG-DTA. The product was proved to be sufficiently pure so as to be used as a good source of MOCVD for the preparation of ferroelectric thin films.

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