MOCVD原料としての高純度[Sr(dpm)2]の合成

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  • Synthesis of Highly Pure [Sr(dpm)2] as a Source for MOCVD

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A dipivaroylmethane (Hdpm) chelate of strontium(II), Sr(dpm)2, was synthesized by the reaction of strontium metal with Hdpm in anhydrous benzene under a highly pure argon atmosphere and characterized by means of ICP, elemental analyses, FT-IR, 1I-I-NMR, "CNMR, and TG-DTA. The product was proved to be sufficiently pure so as to be used as a good source of MOCVD for the preparation of SrTiO3 thin films.

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