Properties of High Purity Pb(dpm), As MOCVD Material

DOI Web Site

Bibliographic Information

Other Title
  • MOCVD原料としての高純度Pb(dpm)<SUB>2</SUB>の特性
  • Properties of High Purity Pb(dpm)2 As MOCVD Material.

Abstract

In order to replace Pb (C2H5)4, which is highly toxic, bis(2, 2, 6, 6-tetramethyl-3, 5-heptanedionato)lead( II ), Pb(dpm)2 was syntesized as a new source material for preparation of ferroelectric thin filme by MOCVD. Pb(dpm)2 was characterized with ICP, elemental analysis, TG-DTA, FT-IR, 11-I-NMR, and 13C-NMR. Vaporization of Pb (dpm)2 started at 105°C as the temperature was raised and steep weight loss was observed in the range of 200 to 280 °C. The vaporization of impurities was not found in TG-DTA. The vaporization completed below 300 °C without residue. Pb (dpm)2 proved to be superior in volatility and purity for the MOCVD source material.

Journal

  • NIPPON KAGAKU KAISHI

    NIPPON KAGAKU KAISHI 1992 (8), 881-884, 1992-08-10

    The Chemical Society of Japan

Keywords

Details 詳細情報について

Report a problem

Back to top