Stiction in MEMS and Its Reduction Methods(Reliability of MEMS)

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  • MEMSにおける張り付きとその対策(MEMSの信頼性)
  • MEMSにおける張り付きとその対策
  • MEMS ニ オケル ハリツキ ト ソノ タイサク

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Abstract

Micro electro mechanical system (MEMS) is notable as a technology of the next generation having a potential to make great change in our society. Due to miniaturi zation and reduction of mechanical joints in MEMS, its resistivity to vibration and mech anical shock remarkably increases. However, new types of problems based on phenomena which are proper to micro meter scale have appeared. The most typical problem is stiction of a movable part in a device with its counter part after a contact between them. Stiction occurs by formation of liquid bridge at a contacting part due to attachment of washing used in MEMS fabrication process and capillary condensation of water vapor from air. Stiction can be sufficiently prevented by improvements of fabrication process, increasing of hydrophobicity of contacting parts and decreasing of contact area between the movable and counter parts.

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