書誌事項
- タイトル別名
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- Reliability Evaluation of Micro Heater and its Application for Automotive Sensors
- マイクロヒータ ノ シンライセイ ヒョウカ ト シャサイヨウ センサ エ ノ オウヨウ
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A heat resistant micro heater consisting of a Pt thin film and a diaphragm was developed for automotive sensors and its reliability was evaluated from the mechanical and thermal points of view. The dominant failure modes for instant overheating and longtime heating were found to be de-lamination of the Pt film and electromigration of Pt, respectively. The life time was estimated to be over 10 years when the average heater temperature was 400°C (the peak temperature was over 600°C). As automotive sensors utilized this micro heater, the developed air flow meter and air quality sensor are described with features and evaluation methods unique to these sensors.
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 126 (8), 397-402, 2006
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204460129408
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- NII論文ID
- 10018182176
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 8056224
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
